JPS62178531U - - Google Patents
Info
- Publication number
- JPS62178531U JPS62178531U JP6663086U JP6663086U JPS62178531U JP S62178531 U JPS62178531 U JP S62178531U JP 6663086 U JP6663086 U JP 6663086U JP 6663086 U JP6663086 U JP 6663086U JP S62178531 U JPS62178531 U JP S62178531U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- semiconductor manufacturing
- view
- insulating film
- center hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6663086U JPH0322912Y2 (en]) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6663086U JPH0322912Y2 (en]) | 1986-04-30 | 1986-04-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62178531U true JPS62178531U (en]) | 1987-11-12 |
| JPH0322912Y2 JPH0322912Y2 (en]) | 1991-05-20 |
Family
ID=30904815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6663086U Expired JPH0322912Y2 (en]) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322912Y2 (en]) |
-
1986
- 1986-04-30 JP JP6663086U patent/JPH0322912Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322912Y2 (en]) | 1991-05-20 |